For compound semi manufacturing

Substrate suppliers and device fabrication companies in the compound semiconductor market rely on Rudolph inspection systems to automatically inspect unpatterned surfaces, qualify substrates at incoming QA, and monitor production tools.

A wide range of defect inspection solutions is available, ranging from cost-effective R&D “table-top” equipment to all-surface cluster systems with automatic defect classification, are designed for high-volume production.

For additional information on specific compound semi solutions, go to “LED” and “Solar” product information on this website.


Unpatterned wafer frontside inspection