Equipment Sentinel

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Equipment Sentinel

Equipment Sentinel™ is an automated, intelligent fault detection and classification (FDC) software solution that seamlessly combines key wafer-level data with tool signal and event data into a single framework, giving users a comprehensive view of equipment and processes. It maximizes the value that can be realized by having full access to all of the data produced by the factory.

Equipment Sentinel software provides global manufacturers of compound semiconductors with a complete snapshot of the fab via an integrated user interface that correlates key advanced process control (APC) and yield management system (YMS) metrics. Its bi-directional data flows enable sensor and product data to be tightly correlated into a single knowledge computing engine, maximizing signal-to-noise ratios, avoiding false positives typically plaguing traditional FDC solutions. By bringing equipment back online faster, this production-tested software can significantly reduce labor costs – particularly engineer and operator labor – and dramatically improve cycle time.

Equipment Sentinel is designed to:

  • Reduce labor cost, both engineering and tool operator
  • Improve cycle time by putting tools back online faster
  • Predict tool fails before they grow into a much larger problem
  • Manage huge volumes of data and real-time analysis
  • Identify meaningful correlations with data from other systems, such as Discover, customer SPC, other metrology
  • Scale with ease to the entire fab

Equipment Sentinel features:

  • Configurable dashboard with tool, parameter, and parameter categories
  • Correlate key YMS metrics with bi-directional data flows
  • Predictive metrology integration
  • Tracking of data grouping, enhanced chamber matching, tool tracing, and automated alarms
  • Heuristic modeling for easy-to-create, human-readable models
  • High-speed data processing and visualization
  • Tool health and tend monitoring, including principal component analysis (PCA)
  • Multivariate analysis (MVA) with real-time interdiction capability
  • Embedded tool-centric analytics for routine wafer to sensor correlation analysis